Facility Tools
Facility Tools
Lithography
- NuArc UV Exposure System
- Ebeam Lab 200
- Karl Suss Mask Aligner
- Quintel Mask Aligner
- Dimatix and Sonoplot Microprinters
Thermal Process
- Hotplates(Thermolyne, Reynolds Tech)
- WVR Vacuum Oven
- Blue M Electric Oven
- Precision Convection Oven
- Themolyne Hotplate
Thin Film Coating/Deposition
- CEE Spincoater (7")
- Headway Spinner
- Laurell Spincoaters
- Angstrom E Sputter Coater
- Temescal e-beam deposition
- Forge Nano Atomic Layer Deposition
Wet Process (Surface Chemistry)
- General Solvent Hood
- Acid and Base Hoods
- Ultrasonic Cleaners
Post Process and Metrology
- J. A. Woollam Ellipsometer
- Olympus BH2 UMA
- Olympus MHL 100
- ACF Bonder
Plasma Etch
- Oxford Plasmalab 80 Plus
Liquid Crystal Device Assembly
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Dry Spacer Sprayer
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LC Tech VacFill
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Villa Precision Scriber
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Manual Scriber
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UVOCS UV Ozone Cleaning Systems
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TNP Laser Repair System
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Asymtek Dispensers (2)
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Dymax Adhesive Curing
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Electrolite ELC 4000 UV